Vacuum component
|
Flange type |
suitable |
property |
|
KF flange/NW flange |
Low vacuum No baking system Pressure: >10-8Torr @Small pipe diameter Clamp type: tongs |
O-ring reuse Assembled country Low cost |
|
ISO flange |
Low vacuum No baking system Pressure: >10-8Torr @large pipe diameter Clamp type: buckle |
O-ring reuse Assembled country Low cost |
|
CF flange |
Ultrahigh vacuum Pressure: <10-8Torr Lucked by screw and nut
|
Sealing by metal washer Keep in ultrahigh vacuum Adopt OFC gasket High accuracy |
