Multi-cavity inline sputtering
| ▲ Inline design include horizontal or vertical |
| ▲High productivity |
| ▲ PLC design and fool-proofing |
| ▲ Design a number of process with customer include of metal sputtering/reactive sputtering/modified/mixed sputtering/clean...etc |
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▲ Application FPD/Chip R/TFT,OLED/NCVM/solar cell |
| ▲ Customized |