Low pressure chemical vapor deposition
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▲ water-cooled for burner ▲ customized for furnace tube, format: 2", 3", 4", 5", 6", 8" ▲ heating by using multi-stage control module that due to different process ▲ Intake equipment: mass flow meter/float-type flow meter ▲ customized for required components |
format
| furnace-customized |
1. 2"~8" 2. quartz boat
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heating control
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1. adopt multi-stage heating and cooling by using PID calculate 2. heating floor-proofing
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vacuum sensor system |
1. low vacuum gauge : convectron gauge 2. pressure: 760 Torr~10-3 Torr
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Intake system-customized
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1. N2 MFC : 0~1000sccm ±1% 2. O2 MFC : 0~1000sccm ±1% 3. float-type flow meter: N2 1000sccm
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pumping system
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1. pumping rate: 300L/min 2. power: 110/220 VAC ; 1 phase
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chamber vacuum value |
1. final pressure: ＜5X10-3Torr |