油擴散式幫浦
DP-250 | DP-350 | |
Pumping speed | 3,700 l/s(air) | 7,000 l/s(air) |
Maximum Throughput | 2.6 torr l/s | 5.6 torr l/s |
Operating Range | 7.5 x 10-4 to <5 x 10-9 torr | 7.5 x 10-4 to <5 x 10-9 torr |
Maximum Forepressure | No load: 0.65 torr Full load: 0.55 torr |
No load: 0.65 torr Full load: 0.55 torr |
Recommended Backing Pump | ≧ 29 m3/hr | ≧ 51 m3/hr |
Backstreaming Rate | < 5.0 x 10-4 mg/cm2/min | < 1 x 10-3 mg/cm2/min |
Warmup Time | ≧15 minutes | ≧15 minutes |
Cooldown Time | ≧25 minutes (with quick cool coil) | ≧25 minutes (with quick cool coil) |
Fluid Charge | 500 cc | 1,000 cc |
Electrical Requirements* | 1 ph, 220V | 1 ph, 220V |
Pump Power | 2,000 watts | 4,400 watts |
Cooling water Requirements | ≧1 l/min | ≧2 l/min |
Water Connections | 1/4"FPT | 1/4"FPT |